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  • 姓名:

    徐静平

  • 职称职务:

    教授

  • 专业方向:

    先进存储器及系统

  • 电话:

    027-87556764

  • 电邮:

    jpxu@mail.hust.edu.cn

  • 地址:

    华中科技大学西七楼509

基本信息

研究所:微纳电子器件研究所

职 务:副系主任、研究所所长

在研项目:

(1)国家自然科学基金项目:小尺寸HfTiO/TaON/GeON堆栈高k栅介质GeOI基MOSFET研究;

(2) 国家自然科学基金项目:小尺寸超薄HfTiON/GGO堆栈高k栅介质InGaAs nMOSFET研究;

(3) 华为技术有限公司合作项目:NAND Flash存储器器件建模。

科研成果

主要科研及教学成果:

(1)2014年被《自然》杂志“点名”,为该年度华中科技大学自然指数最大贡献者之一;

(2)迄今为此,已在IEEE EDL、IEEE TED、Appl Phys Lett.、Appl Phys Express等国际国内重要期刊上发表学术论文100余篇;

(3)华中科技大学校级教学成果一等奖(排名第5);

(4)优秀研究生指导教师奖;

(5)多次获校教学质量优秀奖二等奖。

近几年发表的主要论文如下(*为通讯作者):

1)L. S. Wang,J. P. Xu*, L. Liu, H. H. Lu, P. T. Lai, and W. M. Tang,Interfacial and electrical properties of InGaAs metal-oxide- semiconductor capacitor with TiON/TaON multilayer composite gate dielectric, Appl. Phys. Lett., vol. 106, p. 123504, 2015.

2)L. S. Wang, J. P. Xu*, L. Liu, H. H. Lu, P. T. Lai, and W. M. Tang, Plasma-nitrided GaO(GdO) as interfacial passivation layer for InGaAs metal-oxide-semiconductor capacitor with HfTiON gate dielectric. IEEE Trans. on Electron Devices, vol. 62(4), pp. 1235-1240, 2015.

3)Li-Sheng Wang, Jing-Ping Xu*, Lu Liu, Wing-Man Tang, Pui-To Lai, Nitrided HfTiON/Ga2O3(Gd2O3) as stacked gate dielectric for GaAs MOS applications, Applied Physics Express, vol. 7(6), p. 061201, 2014.

4)Feng Ji, Jing-Ping Xu*, Yong Huang, Lu Liu,and P. T. Lai,Improved Interfacial and Electrical Properties of Ge-Based Metal-Oxide-Semiconductor Capacitor With LaTaON Passivation Layer,IEEE Trans. Electron Devices, vol. 61(11), pp. 3608-3612, 2014.

5) Li-Sheng Wang, Lu Liu, Jing-Ping Xu*, Shu-Yan Zhu, Yuan Huang, and Pui-To Lai, Electrical Properties of HfTiON Gate-Dielectric GaAs Metal-Oxide-Semiconductor Capacitor With AlON as Interlayer, IEEE Trans. Electron Devices, vol. 61(3), pp. 742-746, 2014.

6) J. X. Chen, J. P. Xu*, L. Liu, X. D. Huang, P. T. Lai,Improvements of Performance and Reliability for Metal–Oxide–Nitride–Oxide–Silicon Flash Memory With NO- or N2O-Grown Oxynitride as Tunnel Layer,IEEE Trans. Device and Materials Reliability, vol. 14(1), pp. 9-12, 2014.

7) J. X. Chen, J. P. Xu*, L. Liu, X. D. Huang, P. T. Lai, “Improved performance by using TaON/SiO2 as dual tunnel layer in Charge-Trapping nonvolatile memory”, Microelectronics Reliability, vol.54(2), pp. 393-396, 2014.

8) L. Liu, J. P. Xu*,J. X. Chen, P. T. Lai, Improved characteristics for MOHOS memory with oxygen-rich GdO as charge storage layer annealed by NH3, Applied Physics A. Materials Science & Processing, vol.115(4), pp. 1317-1321, 2014.

9) L. S. Wang, J. P. Xu*, S. Y. Zhu, Y. Huang, P. T. Lai, Improved interfacial and electrical properties of GaAs metal-oxide-semiconductor capacitors with HfTiON as gate dielectric and TaON as passivation interlayer, Appl. Phys. Lett. vol. 103, p. 092901, 2013.

10) J. X. Chen, J. P. Xu*, L. Liu, and P. T. Lai, Improved performances of metal-oxide- nitride-oxide-silicon memory with HfTiON as charge-trapping layer, Appl. Phys. Lett. vol. 103, p. 213507, 2013.

11)Jian-Xiong Chen, Jing-Ping Xu*, Lu Liu, and Pui-To Lai, Performance Improvements of Metal–Oxide–Nitride–Oxide–Silicon Nonvolatile Memory with ZrO2 Charge-Trapping Layer by Using Nitrogen Incorporation, Appl. Phys. Express, vol. 6, p. 084202, 2013.

12) Zhu Shuyan, Xu Jingping*, Wang Lisheng and Huang Yuan,Improved Interface Properties of HfO2 Gate Dielectric GaAs MOS Devices by Using SiNx as Interfacial Passivation Layer,Chin. Phys. B, vol. 22(9), pp. 097301-1-4, 2013.

13)L. Liu, J. P. Xu*, F. Ji, J. X. Chen, P. T. Lai, “Improved Charge-Trapping Properties of TiON/HfON Dual Charge Storage Layer by Tapered Band Structure, Applied Physics Letters, vol. 101(13), p. 133503, 2012.

14) L. Liu, J. P. Xu*, F. Ji, J. X. Chen, P. T. Lai, Improved Memory Characteristics by NH3-Nitrided GdO as Charge Storage Layer for Nonvolatile Memory Applications, Applied Physics Letters, vol. 101(3), p. 033501, 2012.

15) L. Liu, J. P. Xu*, J. X. Chen, X. D. Huang, P. T. Lai, Ultrathin HfON/SiO2 Dual Tunneling Layer for Improving the Electrical Properties of Metal-Oxide-Nitride-Oxide- Silicon Memory, Thin Solid Films, vol. 524, pp. 263-267, 2012.

16)F. Ji, J. P. Xu*, J. G. Liu, C. X. Li, and P. T. Lai, Improved interface properties of Ge metal-oxide-semiconductor capacitor with TaTiO gate dielectric by using in situ TaON passivation interlayer, Applied Physics Letters, vol. 98, pp. 182901-1-3, 2011.

17) F. Ji, J. P. Xu*, P. T. Lai, C. Xi Li, and J. G. Liu, Improved Interfacial Properties of Ge MOS Capacitor With High-k Dielectric by Using TaON/GeON Dual Interlayer, IEEE Electron Device Letters, vol. 32, pp. 122~124, 2011.

18) L. Liu, J. P. Xu*, X. D. Huang, P. T. Lai, A Novel MONOS Memory with High-k HfLaON as Charge-Storage Layer, IEEE Transactions on Device and Materials Reliability, vol. 11(2), pp. 244-247, 2011.

19)黄苑,徐静平*,汪礼胜,朱述炎,不同散射机理对Al2O3/InxGa1-xAs nMOSFET反型沟道电子迁移率的影响,物理学报,vol. 62(15),p. 157201, 2013.

20)何美林,徐静平*,陈建雄,刘璐,LaON/SiO2和HfON/SiO2双隧穿层MONOS存储器存储特性的比较,物理学报,vol. 62(23), p. 238501, 2013.

主要经历

1982.1毕业于华中工学院固体电子学系半导体物理与器件专业,84年获该专业工学硕士学位,并留校任教。1993年获电子材料与元件专业工学博士学位,95年12月至99年6月在香港大学郑耀宗教授(中科院院士、微电子学专家、原香港大学校长)以及黎沛涛教授指导下做博士后研究工作。近几年来,作为访问教授每年赴香港大学或香港理工大学从事2-3个月的合作研究。2000年2月晋升为教授,2002年6月被评聘为博导。自1984年以来,一直从事微电子器件及其集成技术方面的教学与研究工作。2003年至今,作为项目主持人完成国家自然科学基金项目5项,在研2项,是国家自然科学基金通讯评审专家及上会评审专家。主要从事先进的Si、Ge、SiC、GaAs、InGaAs为基小尺寸MOS器件、二维层状半导体MoS2和绝缘层上锗(GeOI)薄膜晶体管以及新型非挥发性半导体存储器方面的研究工作,迄今在国际重要期刊杂志共发表学术论文100余篇。

研究方向

(1)先进的小尺寸CMOS集成器件原理、结构、工艺及应用研究;

(2)二维层状结构过渡金属硫化物在下一代纳电子/光电子器件中的应用研究;

(3)新型非挥发性半导体存储器研究。

姓名 徐静平 职称职务 教授
专业方向 微电子学系 电话 027-87556764
电邮 jpxu@mail.hust.edu.cn 地址